The IIS3DHHC is an ultra-low noise, high-stability three-axis linear accelerometer. The IIS3DHHC has a full scale of ±2.5 g and is capable of providing the measured accelerations to the application through an SPI 4-wire digital interface. The sensing element is manufactured using a dedicated micromachining process developed by STMicroelectronics to produce inertial sensors and actuators on silicon wafers. The IC interface is manufactured using a CMOS process that allows a high level of integration to design a dedicated circuit which is trimmed to better match the characteristics of the sensing element. The IIS3DHHC is available in a high-performance (low-stress) ceramic cavity land grid array (CC LGA) package and can operate within a temperature range of -40 °C to +85 °C.
Applications • Precision inclinometer • Antenna and platform pointing and leveling • Leveling instruments
• 3-axis, ±2.5 g full-scale • Ultra-low noise performance: 45 µg/√Hz • Excellent stability over temperature (<0.4 mg/°C) and time • 16-bit data output • SPI 4-wire digital output interface • Embedded FIFO (depth 32 levels) • Embedded temperature sensor • 12-bit temperature data output • High shock survivability • Extended operating temperature range (-40 °C to +85 °C) • ECOPACK, RoHS and “Green” compliant
https://www.st.com/en/mems-and-sensors/iis3dhhc.html
